Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 113 - 119
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 226 - 234
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 246 - 254
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 179 - 186
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 84 - 94
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 67 - 74
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 127 - 134
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 187 - 195
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 206 - 214
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 169 - 178
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 95 - 101
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 295 - 302
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 283 - 294
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 273 - 282
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 255 - 263
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 17 - 44
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 102 - 112
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 135 - 142
Journal of Microelectromechanical Systems > 2017 > 26 > 1 > 143 - 157